OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement. With products installed worldwide, OAI systems are used for both......OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement. With products installed worldwide, OAI systems are used for both R&D and production of semiconductors, MEMS and microfluidic devices. From mask aligners and UV light sources to UV power meters, OAI is a leader in the industry for over 35 years.