Tender for Cluster Sputtering Tool at Finland's VTT Technical Research Centre

Tender Type: Product and Material Tender (Prior Information Notice)

Project Name: Prior Information Notice for the Procurement of a Cluster Sputtering Tool

Procurement Method: Open Tender

Contract Type: Material Procurement Contract

Project Description: This procurement is a Prior Information Notice for the acquisition of a cluster sputtering tool by Finland's VTT Technical Research Centre for its Micronova cleanroom. The procurement will be part of an EU-wide research project and funded by EU funds. Due to project timeline and funding condition constraints, it is not possible to adhere to the standard deadlines of a regular open tender. Therefore, after the official tender is published, the tender submission period will be shortened to at least 15 days.

Project Content: Procure one cluster sputtering tool for the VTT Micronova cleanroom, for use in semiconductor thin film deposition processes. The system will support advanced microelectronics and nanotechnology research, serving collaborative research projects within the EU.

Scope of Supply:

One main cluster sputtering tool unit.

Multi-target co-sputtering system (supports double-sided coating).

Wafer and wafer carrier handling system.

Interfaces and reserved chamber positions for future expansion.

Equipment control software and user interface.

Standard spare parts kit.

Specialized tools and calibration equipment.

Operation manual and technical documentation (in English).

Installation and commissioning services.

Operation training services.

Technical support during the 12-month warranty period.

Remote diagnostics and maintenance access.

Software update and upgrade services (during warranty period).

Acceptance test support service.

Equipment relocation and reinstallation support (if required).

Technical Requirements:

Capable of multi-target co-sputtering, supporting at least 3 or more sputtering target positions.

Supports handling of wafers and wafer carriers for double-sided coating.

Sputtering uniformity better than ±5% (full wafer range).

System base vacuum better than 5×10⁻⁷ Torr.

Equipped with high-precision Mass Flow Controllers (MFC).

Supports Radio Frequency (RF) and Direct Current (DC) sputtering modes.

Includes substrate heating function, with maximum temperature not less than 300°C.

Supports in-situ pre-cleaning or etching function.

Equipped with endpoint detection system.

Automated control interface supports recipe programming and multi-step processes.

System design complies with SEMI S2/S8 safety standards.

Cleanroom compatible design (ISO Class 5 or higher).

Complete data logging and traceability functions.

System allows for future expansion of at least 2 additional process chambers.

Modular design for ease of maintenance and upgrades.

Technical Specifications: Complies with international semiconductor equipment standards, supports processing of 200mm and smaller wafer sizes, compatible with standard wafer carriers. The system must meet EU CE certification requirements and provide complete technical specification documentation.

Technical Standards: SEMI S2 (Environmental, Health, and Safety Standards), SEMI S8 (Ergonomics Standards), CE certification standards, ISO 9001 Quality Management System standards, ISO 14644-1 Cleanroom standards (applied to equipment design).

Quality Standards: Upon equipment acceptance, agreed-upon process performance indicators must be met, including sputtering rate, film thickness uniformity, particle control, repeatability, etc. Provide Factory Acceptance Test (FAT) and Site Acceptance Test (SAT) reports.

Installation Requirements: Supplier is responsible for equipment transportation, positioning, installation, connection, and commissioning. Installation environment is an ISO Class 5 cleanroom. Supplier must provide detailed installation condition specifications (including power, cooling water, gases, exhaust, etc.).

Commissioning Requirements: Supplier must dispatch experienced engineers to complete on-site equipment commissioning, ensuring the system meets technical specification requirements. Provide a complete commissioning report upon completion.

Warranty Period: At least 12 months from the date of final acceptance. Free replacement and repair services for non-man-made damage parts during the warranty period.

Spare Parts Requirements: Provide a recommended spare parts list and commitment to spare parts supply, ensuring availability of key components for at least 5 years after the warranty period expires.

Equipment Operation Requirements: Supports 24/7 continuous operation mode, Mean Time Between Failures (MTBF) not less than 1000 hours, Mean Time To Repair (MTTR) not exceeding 48 hours.

Product Certification Requirements: Provide EU CE certification certificate, compliant with EU Low Voltage Directive and Electromagnetic Compatibility Directive requirements.

Environmental Standards: Complies with RoHS Directive (Restriction of Hazardous Substances) requirements, provide material composition declaration.

Safety Standards: Equipped with a complete safety interlock system, including emergency stop buttons, chamber pressure interlocks, door switches, radiation protection, etc., complying with SEMI S2 safety standards.

Test and Acceptance Standards:

Factory Acceptance Test (FAT) conducted at the supplier's factory to verify basic functions and performance indicators.

Site Acceptance Test (SAT) conducted in the VTT Micronova cleanroom to verify actual process capabilities.

Acceptance criteria include: Base vacuum level, sputtering rate, film thickness uniformity, particle count, repeatability, etc.

Provide complete test methods and acceptance protocols.

Final acceptance documents can only be signed after both parties jointly confirm the acceptance report.

System Compatibility Requirements: The equipment control system must be compatible with VTT's existing factory automation system, support SECS/GEM communication protocol, facilitating future integration into the MES system.

Technical Documentation Submission Requirements: Submit complete technical documentation in English, including but not limited to: Operation Manual, Maintenance Manual, Circuit Diagrams, Pneumatic Diagrams, Software User Manual, Spare Parts List, Calibration Certificates, Test Reports, etc.

Training Service Requirements:

Provide on-site operation training for at least 3 personnel, for no less than 5 working days.

Provide maintenance training for at least 2 personnel, for no less than 3 working days.

Training content includes: Equipment operation, process programming, routine maintenance, fault diagnosis, safety procedures, etc.

Provide complete training materials.

Service Scope:

Equipment transportation and insurance.

On-site installation and commissioning.

Operation and maintenance training.

12-month warranty service.

Remote technical support.

Software upgrade services.

Preventive maintenance services (optional).

Spare parts supply guarantee.

Process development support (optional).

Equipment relocation support (if required).

Implementation Period: 12 months (calculated from the effective date of the contract)

Contract Information: Contract type is Material Procurement Contract; Contract duration is 12 months; Budget amount is not specified in the document; Funding source is EU funds.

Tender Requirements:

Tender language is English.

Submission via designated platform after the official tender is published.

Multiple tenders are allowed.

Tender submission period will be at least 15 days after the official tender is published.

No need to submit a tender or express interest to participate at this Prior Information Notice stage, but it is recommended to monitor the release of the official tender.

Timeline:

Prior Information Notice release date: March 13, 2026.

Deadline for expressing interest to participate: March 31, 2026, 21:00 (Western European Time, UTC+00:00).

Official tender documents expected to be released in Spring 2026, but no specific date is promised.

Tender submission deadline will be at least 15 days after the official tender is published.