planar magnetron for sputtering

angstrom sciences magnetrons are recognized as the new standard of the sputtering industry. because, in addition to the advanced features provided by the angstrom advantagetm, they offer a host of other performance effici......angstrom sciences magnetrons are recognized as the new standard of the sputtering industry. because, in addition to the advanced features provided by the angstrom advantagetm, they offer a host of other performance efficiencies as well. versatile design their ultra compact design makes them ideal for virtually any new or retrofit application including the most complex multiple-cathode cluster or the smallest vacuum chamber. low-impedance heads provide rf, dc, mid frequency dc, and pulse dc power capability. all utilities are maintained at atmosphere and are accessed through standard o-ring compression fittings for ease of installation in any vacuum system. lower pressure, higher power all our magnetrons operate at extremely low pressure, in the 10-4 torr range and can deliver practical power densities in excess of 300 watts per square inch. high rates and performance that means they can coat a greater area for their cathode size than other magnetrons. so you can maximize both your coating zone and your target utilization without the kind of trade-off in rate that other magnetrons force you to make. greater performance yet these same advanced planar magnetrons can give you target utilization as high as 50%. our magnetrons also deliver much greater uniformity of deposition routinely in the 3 to 5% range. one of our research customers has even documented uniformity of 0.1% with angstrom sciences magnetrons. full range of sizes angstrom sciences circular magnetrons are available in 1-16 inch target sizes. the linear magnetrons are available in target widths of 1.5 to 12 inches and in target lengths from 1 to 20 feet.