1. The switch life is up to 100,000 times, and the valve closing or opening time is less than 1s
2. Micron-level dustproof structure

3. Wear-resistant and erosion-resistant
4. Low fugitive packing structure
Connection method Flange
Size NPS 2~4 DN50~100
Applicable temperature -29~400°C
Pressure level ASME CLASS 150~1500
Valve body material Stainless steel
Valve stem material Stainless steel
Valve core material Stainless steel + SUC proprietary formula coating
Valve seat material Stainless steel + SUC proprietary formula coating
Application range Polysilicon, silicone

Applicable media Hydrogen, nitrogen, tetrachlorosilane, trichlorosilane, silicon dioxide and other gases or gas-solid mixtures