en.Wedoany.com Reported - On July 19, Befar Group achieved the production of electronic-grade high-purity hydrogen fluoride gas under the framework of the Beikun Project and launched new products. Befar Group has achieved technological breakthroughs in four areas: process, engineering, testing, and filling, forming a closed-loop control from preparation to packaging. Its high-purity hydrogen fluoride product for semiconductors has reached a purity level of 6N (99.9999%), placing it at an internationally advanced level.
High-purity hydrogen fluoride is known as the "blood" of semiconductor manufacturing, serving as an irreplaceable material for cleaning, etching, and chamber maintenance, with its purity directly determining wafer yield. 6N-grade high-purity hydrogen fluoride is essential for advanced processes of 28 nanometers and below. China has long relied on imports, with foreign companies monopolizing approximately 80% of the global market share for 6N-grade high-purity hydrogen fluoride.
Semiconductor-grade hydrogen fluoride requires a purity above 99.999% (5N). Moving from 5N to 6N is not merely an additional purification step but necessitates an entirely new purification system. According to Liu Teng, General Manager of Befar Group's Specialty Chemicals Division, the key to achieving 6N purity lies in removing trace amounts of water, carbon dioxide, oxygen-containing organic compounds, and other mutually soluble impurities from hydrogen fluoride. Befar Group has designed a multi-stage distillation coupling system in the rectification section. By optimizing column internals and operating windows, deep removal of carbon and oxygen impurities is achieved under specific pressure gradients, controlling key impurities such as carbon and oxygen at the source. Additionally, to address the issue of environmental interference in carbon dioxide analysis, Befar Group independently developed a closed precise sampling system and a highly sensitive analysis scheme, minimizing environmental background interference during sampling and ensuring that analytical data accurately reflect product quality, thereby guaranteeing the stability and reliability of the 6N standard.
The 6N breakthrough represents a systematic technological effort across four areas: process, engineering, testing, and filling. On the engineering front, Befar Group overcame challenges in controlling impurity precipitation from material selection and flow field circulation technology, ensuring a contamination-free preparation process. On the filling front, it achieved breakthroughs in cylinder pretreatment protection and impurity replacement and removal technology, securing the final checkpoint before product shipment. These four areas form a closed loop, stabilizing product quality at the 6N level and reaching internationally advanced standards.
Currently, the market price for 6N-grade high-purity hydrogen fluoride exceeds 2 million RMB per ton. Befar Group has completed the construction and commissioning of an annual 50-ton high-purity hydrogen fluoride cylinder filling line, obtained the cylinder filling license issued by the Shandong Special Equipment Inspection Institute, secured complete production, filling, and sales procedures, and has begun product promotion to key domestic and international customers.
