en.Wedoany.com Reported - In the semiconductor manufacturing field, the installation accuracy of the lithography machine base serves as the physical cornerstone for ensuring chip yield. Since the base must support extremely heavy equipment and maintain nanometer-level stability, any slight deformation or positional deviation can lead to lithography alignment failure. China's precision manufacturing sector is addressing the shortcomings of traditional methods in terms of efficiency, benchmark unification, and dynamic guidance by introducing advanced measurement technologies. The inspection of lithography machine bases primarily focuses on the base table's flatness, hole size and position accuracy, and the positional adjustment after combining multiple bases. As the "zero-point reference" for lithography machine installation, the table flatness typically requires micron-level accuracy, while the inspection of numerous positioning pin holes and threaded holes necessitates strict control of three-dimensional deviations to eliminate installation stress. Furthermore, ensuring that multiple independent bases, such as those for exposure, measurement, and transfer, form a high-rigidity platform within a unified coordinate system is also crucial for precision assembly.
To address the limitations of traditional tools like electronic levels, theodolites, or fixed CMMs in large base inspections, such as insufficient measurement range and difficulty in unifying benchmarks, the Radian laser tracker has significantly improved inspection quality with its large-scale spatial measurement capability and dynamic feedback characteristics. This equipment can establish a globally unified coordinate system within a radius exceeding 80 meters, integrating flatness, hole positions, and inter-base relationships under the same reference, thereby completely eliminating cumulative errors from reference conversions. With a data acquisition rate of 1000Hz, operators can quickly obtain spatial point clouds using a reflective target ball with a built-in prism, achieving comprehensive coverage of the base's geometric features. This Radian laser tracker transforms the "inspect-adjust-reinspect" serial mode into a "real-time verification" parallel mode. The software displays the deviation between the actual position and the theoretical design in real-time, guiding technicians in precise closed-loop fine-tuning.
During practical implementation, technicians first deploy the Radian laser tracker to establish the initial coordinate system, then acquire data from key feature points through contact measurement. All measurement data is transmitted in real-time to the supporting software for plane fitting and aperture calculation. The generated color contour maps and deviation lists provide digital proof for base acceptance. This capability for high-precision, large-scale, real-time dynamic measurement not only ensures precise control over base table flatness and hole position accuracy but also provides a solid technical foundation for the precision installation of high-end semiconductor equipment through digital management. The application of the Radian laser tracker has significantly enhanced installation efficiency and quality, making it an indispensable core measurement tool in the precision engineering field of China's semiconductor industry.
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