en.Wedoany.com Reported - SurplusGlobal, a semiconductor equipment and parts distribution company, announced the completion of three Korean patent registrations related to ALD (Atomic Layer Deposition) processes and wafer transfer, marking the company's business expansion from second-hand equipment trading to equipment refurbishment and upgrade technology capabilities. On the 15th, SurplusGlobal disclosed that it has obtained three Korean patents covering an ALD reactor sealing system and sealing release method, an ALD valve monitoring method and system, and a wafer transfer detection device and wafer loading system. The company stated that the significance of these patent registrations lies in strengthening its refurbishment and upgrade technology capabilities to enhance equipment performance and utilization value, going beyond mere second-hand semiconductor equipment trading.
The patent for the ALD reactor sealing system and sealing release method improves process reliability by stably controlling the internal pressure of the reactor. This technology precisely manages the pressure difference between the upper and lower regions of the reactor, aiming to minimize potential pressure imbalances during process execution. This helps reduce risks during equipment opening, maintenance, and restart, while improving the reusability and operational reliability of existing equipment. The patent for the ALD valve monitoring method and system analyzes the status of valves, core components of semiconductor equipment, based on AI. This technology analyzes valve opening and closing actions, pressure, and flow data in real-time, enabling early detection of abnormal signs and prediction of future states. It is used to optimize preventive maintenance systems and serves as foundational technology supporting the management of critical component status and extending equipment lifespan.
The patent for the wafer transfer detection device and wafer loading system precisely detects alignment status during wafer transfer and loading processes. This technology uses vision sensors to analyze wafer position and alignment status in real-time, enabling rapid detection of misalignment that may occur during transfer. It helps improve productivity and quality stability during equipment restart and process application.
In the course of conducting second-hand semiconductor equipment trading, refurbishment, and technical services, SurplusGlobal has continuously accumulated technical capabilities related to equipment operation, maintenance, and process stability. Based on the Yongin Semiconductor Equipment Cluster, the company conducts equipment evaluation, process verification, technical support, and training activities, and these patent registrations are the result of field experience and R&D efforts. The company is expanding its technology portfolio from simply reselling second-hand equipment to becoming a semiconductor equipment refurbishment and upgrade enterprise that diagnoses and improves equipment status, granting new utilization value. ALD process stabilization, AI-based equipment diagnostics, and wafer transfer technologies are considered core technologies for enhancing the reusability of existing equipment and contributing to the stability and productivity of semiconductor manufacturing processes. SurplusGlobal operates the semiconductor equipment and parts trading platform "SemiMarket" and recently registered a patent related to AI-based export control automation technology (ECP AI Agent), simultaneously strengthening its equipment technology and digital platform capabilities. The company plans to promote the reuse, recirculation, and value recreation of semiconductor equipment by connecting equipment and parts trading data, process technology, and AI diagnostic technology, and aims to expand its technological competitiveness towards improving the efficiency and sustainability of the global semiconductor supply chain. SurplusGlobal CEO Kim Jeong-woong stated that semiconductor equipment refurbishment and upgrade is not simply about reusing second-hand equipment, but a process of correctly diagnosing equipment status, enhancing performance and utilization value, and enabling its reuse within the industrial ecosystem. These patent registrations will serve as an important opportunity for SurplusGlobal to simultaneously strengthen its equipment trading business and process technology capabilities. He added that the company is expanding the acquired ALD and AI-based equipment diagnostic technologies to etching process equipment, with the goal of extending intelligent solutions to all major traditional process equipment in the future.
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